984,896 984,896 984,896 195,553 195,553 195,553 195,553 195,553 181,930 181,024 180,123 179,225 178,332 124,376 124,376 124,376 124,376 124,376 5,719,019 5,718,114 5,717,212 1,235 4,423,252 7,744,860 7,705,882 8,983,107 8,943,598 8,904,268 7,744,860 7,705,882 50,224,179 59,167,778 68,072,045 75,816,905 83,522,788 18 19 20 21 22 91.69% 91.28% 90.87% 90.46% 90.05% 984,896 984,896 984,896 195,553 195,553 195,553 195,553 195,553 181,930 181,024 180,123 179,225 178,332 124,376 124,376 124,376 124,376 124,376 0 0 0 0 0 5,719,019 5,718,114